Morgan Technical Ceramics Receives US Trademark

Morgan Technical Ceramics announced that it has received a U.S. trademark for Sharkskin(TM) high-roughness textured alumina material, manufactured at its Hayward, CA site. Sharkskin provides a high-roughness surface texture integral to the alumina base material. The roughened surface improves process residue adhesion for film processes, primarily for physical vapor deposition , plasma-enhanced PVD and chemical vapor deposition. The improved adhesion enhances equipment productivity by extending service life, reducing overall particulate defects and reducing the total number of preventative maintenance cycles per chamber.

The use of Sharkskin enables reliable deposition of highly compressive films. Chip manufacturing companies have already been successful in using Sharkskin in a PVD deposition chamber within a production environment.

Sharkskin prototype and volume production capabilities include green or fired parts and new and used parts. The material is ideal for parts with complex geometries. Sharkskin has the same acid and plasma-resistant qualities as the high purity alumina material already widely used in semiconductor manufacturing tools, and can be cleaned and recycled using current technology. It can be used for tungsten, aluminum and copper deposition applications.

Used primarily for reactor domes, shields, and cover rings, Sharkskin can serve as a foundation to help the twin-wire arc spray layer adhere better to the base ceramic, doubling TWAS adhesion. Sharkskin also eliminates the need to re-grit blast parts after each cleaning, because the roughness is permanent and doesn't degrade with multiple use and cleaning. A further advantage is that Sharkskin is acid resistant and can therefore be used in environments where use of TWAS is precluded.

"Today's thinner integrated circuits demand better film adhesion," said Ed Tomasek, New Business Development Manager at MTC. "Advancements in process residue adhesion decrease chip defects and increase yields. Since adhesion is improved by roughening surfaces, Sharkskin offers an excellent option to replace or complement such traditional ceramic roughening methods as grit blasting or TWAS."

The Sharkskin texture can be placed exactly and precisely where it is most needed. Existing components that are now coated with TWAS can be textured with the Sharkskin material, minimizing disruption to existing processes and speeding the new component qualification process.

Although primarily used for PVD and CVD processes, Sharkskin texturing may also be suitable for etch processes, where photoresist materials can deposit within chambers and flake off. Sharkskin can also be used in solar applications to change reflectivity of surfaces for improved efficiency of solar panels. Medical and laser applications that require high adhesion properties may also benefit from use of the new process.